Weekly Semiconductor Process Control Summary

Track and analyze key process control metrics across semiconductor manufacturing operations, focusing on yield, defect density, parameter control, and equipment performance to maintain quality and optimize production efficiency.

Report Objective

Monitor and analyze critical semiconductor manufacturing process control metrics, including yield rates, defect density, parameter stability, and equipment effectiveness. This weekly analysis enables rapid identification of process deviations and supports continuous improvement initiatives.

Yield and Defect Trends

Line chart showing weekly yield percentage and defect density trends by process step

Questions to Consider:

2024-W482025-W002025-W04week93.093.594.094.5sum(yield_percentage) vs. process_stepsum(yield_percentage)process_stepHow is Manufacturing Yield Trending?Yield percentage tracked weekly across process steps
  • Are there any significant deviations from target yield?

  • Which process steps show consistent yield performance?

  • What is the week-over-week yield trend?

  • Which process steps show elevated defect levels?

  • Are there any recurring patterns in defect density?

  • How do defect rates correlate with yield performance?

2024-W482025-W002025-W04week0.160.180.200.22sum(defect_density) vs. process_stepsum(defect_density)process_stepWhat are the Defect Density Patterns?Weekly defect density measurements by process step

Statistical Process Control

Line chart tracking Cpk index and out-of-spec percentage

Questions to Consider:

2024-W482025-W002025-W04week1.401.451.50cpk_indexcpk_indexHow Stable are Our Critical Parameters?Process capability index and out-of-spec trending
  • Is the process capability index trending towards improvement?

  • Are there concerning trends in parameter stability?

  • How does current Cpk compare to historical performance?

Equipment Performance Analysis

Bar chart showing OEE by equipment type with weekly comparison

Questions to Consider:

  • Which equipment types require immediate attention?

  • How does OEE vary across different equipment categories?

  • Are there systematic issues affecting multiple equipment types?

Wafer ScannerEtcherCVDIon ImplanterInspection Toolequipment_type0.0500.01000.01500.0sum(oee_percentage)sum(oee_percentage)What is the Equipment Performance Status?Overall Equipment Effectiveness (OEE) by equipment type